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igus®

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drylin® cleanroom compatibility, ESD compatibility and RoHS

Fraunhofer tested device  

The tested drylin® guides reveal a distinct applicability for cleanrooms. In this connection, the individual cleanroom classes have to be considered in relation to the required speed and load. The combination of iglidur® J with anodized and hard-anodized aluminum has "Level 1" in the ESD compatibility according to SEMI E78-0998 (best evaluation).

All drylin® linear guides are designed for dry operation and have been tested under this condition. No oils or fats were used as additional lubricants.

The following drylin® guides from igus® were tested: N40, W10, T25 and T30.

Linear guide drylin® NK-02-40-02

"For the linear guide drylin® NK-02-40-02 made by the company igus® GmbH, a distinct suitability for cleanrooms of the ISO Class 6 according to DIN EN ISO 14644-1 can be deduced from the respective calculations of the limit value transgression probability of the detection sizes 0.2 μm, 0.3 μm, 0.5 μm and 5 μm at a travel speed v = 1 m/s. "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide drylin® NK-02-40- 02 can be classified as suitable for the "Level 1". Fraunhofer IPA Report No.: IG 0308- 295 73

Linear guide drylin® TK-01-30-01

"For the linear guide drylin® TK-01-30-01 made by the company igus® GmbH, a distinct suitability for cleanrooms of the ISO Class 3 according to DIN EN ISO 14644-1 can be deduced from the respective calculations of the limit value transgression probability of the detection sizes 0.2 μm, 0.3 μm, 0.5 μm and 5 μm at a travel speed v = 0.1 m/s. “

Linear guide drylin® TK-01-25-02

"For the linear guide drylin® TK-01-25-02 made by the company igus® GmbH, a distinct suitability for cleanrooms of the ISO Class 5 according to DIN EN ISO 14644-1 can be deduced from the respective calculations of the limit value transgression probability of the detection sizes 0,2 μm, 0,3 μm, 0,5 μm and 5 μm at a travel speed v = 1 m/s. "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide drylin® TK-01-25-02 can be classified as suitable for the "Level 1".

Linear guide drylin® WK-10-40-15-01

"For the linear guide drylin® WK-10-40-15-01 made by the company igus® GmbH, a distinct suitability for cleanrooms of the ISO Class 6 according to DIN EN ISO 14644-1 can be deduced from the respective calculations of the limit value transgression probability of the detection sizes 0.2 μm, 0.3 μm, 0.5 μm and 5 μm at a travel speed v = 1 m/s. "
The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide drylin® WK-10-40- 15-01 can be classified as suitable for the "Level 1". Fraunhofer IPA Report No.: IG 0308-295 74

 
 
 
cleanroom drylin®

Measurement of particle abrasion

 
drylin® NK-02-40-02
cleanroom drylin®

Measurement of particle abrasion

 
drylin® TK-01-25-02
cleanroom drylin®

Measurement of particle abrasion

 
drylin® WK-10-40-15-01
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